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Submicron Lithography. Proceedings of SPIE-The International Society for Optical Engineering, Vol. 333
Blais, Phillip D., editor
/ The Society of Photo-Optical Instrumentation Engineers 1982
179 pp., oversize paperback, very good. Volumes
Included: 1
ISBN: 0892523689
Subject/Keywords: physics lithography
Item #: 494766
$22.36