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Materials for Microlithography: Radiation-Sensitive Polymers (ACS Symposium Series 266)
Larry F. Thompson, C. G. Willson, Jean M. J. Frechet
/ American Chemical Society 1984
494 pp., Hardcover, ex library, else text and binding clean and tight. Volumes
Included: 1
ISBN: 0841208719
Subject/Keywords: Microlithography dpt ntt
Item #: 1107771
$23.59